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Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science

This story is from 2026-09-14. It is preserved in the archive; the latest stories are on the live feed.

arXiv:2609.12139v1 Announce Type: new Abstract: Atomic layer deposition (ALD) and atomic layer etching (ALE) are reported heterogeneously across experimental and simulation literature in materials science, hindering comparison and machine-actionable reuse. We present four domain-expert-reviewed JSO…

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  1. 2026-09-14 04:00 · arXiv cs.AI
    Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science

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