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System design for physical AI: from a defect image to the chamber that drifted

By Muhammad Umar. This is the engineering summary of an open reference architecture. The paper, its object model as JSON and the model register are free to reuse under CC BY 4.0: https://codeatoms.ai/wafer-defect-inspection-us/ . DOI 10.5281/zenodo.23889770 . The operator is described by class, nev…

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  1. 2026-11-03 07:41 · DEV Community — AI
    System design for physical AI: from a defect image to the chamber that drifted

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